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Wafer Plane Analysis (2015)

Tech Talk: 14nm

Multi-Patterning Techniques: Enabling Dimensions Beyond Lithography Resolution Limits

Intle Hitting hard on 10 nm chips

10nm FinFet Production Right On Track For TSMC - Testing in 2016 & Full Production 2017

Double-Triple Patterning (2016)

Tech Talk: Multipatterning

High aspect ratio 10-nm-scale nanoaperture arrays with template-guided metal dewetting

Double Patterning to the rescue (LELE, LFLE, SADP) - Part 1

Multipatterning, Take 2 (2014)

Seminar: Lithography and self-assembly below 10 nm
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Last Updated: August 16, 2026
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